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The first fully automated production integrated TSV electric micro mirror chip in China has been launched

  • Release time: June 19, 2025
  • Author: Founder

On June 15th, Professor Xie Huikai, Dean of the Chongqing Microelectronics Research Institute at Beijing Institute of Technology, showcased China's first fully independently produced integrated TSV electric heating micro mirror chip at the Xiyong Microelectronics Park in the Western (Chongqing) Science City. Micro mirror chips are the "heart" of precision instruments, which can be widely used in fields such as biomedicine and AR/VR.

At present, Beili Microelectronics Institute has achieved independent and controllable control over the entire process of chip design, wafer level manufacturing, packaging, and testing, making Chongqing the only city in China that integrates targeted research and mass production of high-performance electric micro mirror chips. Compared with similar products, this chip has significant advantages in packaging size, scanning field of view, and significantly reduces costs. This is a microcosm of the development of Chongqing's integrated circuit industry. With the continuous efforts of companies such as STMicroelectronics and China Resources Microelectronics, "Chinese chips" are gradually breaking away from the "foreign heart" situation.

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